FEA analysis MEMS resonator
Simulating a MEMS resonator is important in the production for the semiconductor industry. Several modes of the COMSOL software could be used to map the vibration and energy losses. Some examples:
- vibrations and natural frequencies
- mode coupling
- anchor loss
- damping in silicon material
- low pressure gas damping of the resonator
- influence of trace contamination
- electrical capacitance as a function of the driver frequency.