Semi Conductors
Simulation of a MEMS resonator is important for the production environment in the semi conductor industry. Many modules from the software of COMSOL could be used to map the vibration behavior and the loss items. Some examples of a simulation are:
- vibrations and eigenmodes.
- mode coupling
- anchor loss
- damping in silicon wafer material
- low gas pressure damping effects
- influence of traces of debris
- electrical capacity as function of the driver frequency.
