Semi Conductors
Simulation of a MEMS resonator is important for the production environment in the semi conductor industry. Many modules from the software of COMSOL could be used to map the vibration behavior and the loss items. Some examples of a simulation are:
- vibrations and eigenmodes.
- mode coupling
- anchor loss
- damping in silicon wafer material
- low gas pressure damping effects
- influence of traces of debris
- electrical capacity as function of the driver frequency.
Mems resonator
A MEMS (Micro-Electro-Mechanical System) resonator works by converting electrtical energy into mechanical vibration and then back into electrical energy at specific, stable frequency. This is achieved using an input transducer (like an electrostatic or piezoelectric actuator) to create a force on a micro-scale structure, causing it to vibrate mechanically. An output transducer then detects this vibration and converts the mechanical motion back into an electrical signal, sustaining the oscillation. On the right an impression of anchor losses in a MEMS resonator.